Quantum Well InAs/AlSb/GaSb Vertical Tunnel FET With HSQ Mechanical Support

نویسندگان

  • Yuping Zeng
  • Chien-I Kuo
  • Chingyi Hsu
  • Mohammad Najmzadeh
  • Angada Sachid
  • Rehan Kapadia
  • Chunwing Yeung
  • Edward Chang
  • Chenming Hu
  • Ali Javey
چکیده

A type-III (broken gap) band alignment heterojunction vertical in-line InAs/AlSb/GaSb tunnel FET, including a 2-nmthin AlSb tunneling barrier is demonstrated. The impact of overlap and underlap gate is studied experimentally and supported further by quasi-stationary 2-D TCAD Sentaurus device simulations. Hydrogen silsesquioxane is used as a novel mechanical support structure to suspend the 10-nm-thin InAs drain with enough undercut to be able to demonstrate an overlap gate architecture. The overlap gate InAs/AlSb/GaSb TFET shows an ON current density of 22 μA/μm2 at VGS = VDS = 0.4 V and the subthreshold slope is 194 mV/decade at room temperature and 46 mV/decade at 100 K.

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تاریخ انتشار 2015